[1]許建平,王佳杰,齊海群,等.電磁場增強多弧離子鍍AlTiN涂層抗高溫氧化研究[J].哈爾濱工程大學學報,2021,42(5):738-744.[doi:10.11990/jheu.202001046]
 XU Jianping,WANG Jiajie,QI Haiqun,et al.High-temperature oxidation characteristics of AlTiN coating by electromagnetic field enhanced arc ion plating[J].Journal of Harbin Engineering University,2021,42(5):738-744.[doi:10.11990/jheu.202001046]
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電磁場增強多弧離子鍍AlTiN涂層抗高溫氧化研究(/HTML)
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《哈爾濱工程大學學報》[ISSN:1006-6977/CN:61-1281/TN]

卷:
42
期數:
2021年5期
頁碼:
738-744
欄目:
出版日期:
2021-05-05

文章信息/Info

Title:
High-temperature oxidation characteristics of AlTiN coating by electromagnetic field enhanced arc ion plating
作者:
許建平1 王佳杰1 齊海群1 王國星1 尹志娟1 鞏春志2 陳晶3
1. 黑龍江工程學院 材料與化學工程學院, 黑龍江 哈爾濱 150050;
2. 哈爾濱工業大學 先進焊接與連接國家重點實驗室, 黑龍江 哈爾濱 150001;
3. 黑龍江省科學技術館, 黑龍江 哈爾濱 150000
Author(s):
XU Jianping1 WANG Jiajie1 QI Haiqun1 WANG Guoxing1 YIN Zhijuan1 GONG Chunzhi2 CHEN Jing3
1. Department of Materials and Chemical Engineering, Heilongjiang Institute of Technology, Harbin 150050, China;
2. State Key Laboratory of Advanced Welding and Joining, Harbin Institute of Technology, Harbin 150001, China;
3. Heilongjiang Science and Technology Museum, Harbin 150000, China
關鍵詞:
多弧離子鍍AlTiN高溫氧化涂層偏壓沉積速率
分類號:
TB306
DOI:
10.11990/jheu.202001046
文獻標志碼:
A
摘要:
針對不同偏壓下電磁場增強多弧離子鍍技術制備AlTiN涂層組織結構及涂層抗高溫氧化性能的復雜問題,本文利用電磁場增強多弧離子鍍技術制備AlTiN涂層,采用SEM和XRD等分析測試方法研究脈沖負偏壓對AlTiN涂層微觀結構、沉積速率等性能影響規律,利用氧化增重方法研究AlTiN抗高溫氧化性能。研究結果表明:AlTiN涂層結構致密,AlTiN涂層擇優取向生長;涂層沉積速率隨著偏壓增加而呈現出先增加后降低趨勢,最高2.8 μm/h;AlTiN涂層晶粒尺寸隨著氧化溫度的升高而逐漸增加;AlTiN涂層抗氧化溫度超過800 ℃,涂層氧化質量快速增加,900 ℃氧化后,AlTiN涂層表現出細膩表面形貌;AlTiN涂層氧化后出現致密結構的Al2O3物相。

參考文獻/References:

[1] ZHANG Quan, XU Yuxiang, ZHANG Tengfei, et al. Tribological properties, oxidation resistance and turning performance of AlTiN/AlCrSiN multilayer coatings by arc ion plating[J]. Surface and coatings technology, 2018, 356:1-10.
[2] PRENGEL H G, SANTHANAM A T, PENICH R M, et al. Advanced PVD-TiAlN coatings on carbide and cermet cutting tools[J]. Surface and coatings technology, 1997, 94-95:597-602.
[3] ZHAO Yanhui, GUO Chaoqian, YANG Wenjin, et al. TiN films deposition inside stainless-steel tubes using magnetic field-enhanced arc ion plating[J]. Vacuum, 2015, 112:46-54.
[4] WANG Lijun, WANG Mengchao, CHEN Hui. Corrosion mechanism investigation of TiAlN/CrN superlattice coating by multi-arc ion plating in 3.5 wt% NaCl solution[J]. Surface and coatings technology, 2020, 391:125660.
[5] 王澤松, 梁楓, 項燕雄, 等. 低轉速下多弧離子鍍制備的Mo-Ti-Al-N超晶格硬質涂層的微結構及背散射譜分析[J]. 表面技術, 2019, 48(4):160-167. WANG Zesong, LIANG Feng, XIANG Yanxiong, et al. Analysis on microstructure and backscattering spectroscopy of superlattice Mo-Ti-Al-N hard coatings prepared by multi-arc ion plating at low rotation speed[J]. Surface technology, 2019, 48(4):160-167.
[6] WEI Xianshun, DONG Yue, QU Dongdong, et al. Effect of deposition parameters on microstructure of the Ti-Mg immiscible alloy thin film deposited by multi-arc ion plating[J]. Metals, 2019, 9(11):1229.
[7] 汪鵬, 許昌慶, 蔡飛, 等. 多弧離子鍍TiAlSiN梯度涂層制備及切削性能[J]. 中國表面工程, 2019, 32(2):34-43. WANG Peng, XU Changqing, CAI Fei, et al. Preparation and cutting performance of TiAlSiN gradient coating by multi-arc ion plating[J]. China surface engineering, 2019, 32(2):34-43.
[8] DU Xiaoye, GAO Bo, LI Yanhuai, et al. Fabrication of multiscale structured hydrophobic NiCrZrN coating with high abrasion resistance using multi-arc ion plating[J]. Journal of alloys and compounds, 2020, 812:152140.
[9] JIANG K M, ZHAO D Q, JIANG Xin, et al. Electronic-structure, corrosion and mechanical properties of nc-CrC/a-C:H films deposited by multi-arc ion plating[J]. Journal of alloys and compounds, 2018, 750:560-569.
[10] IRUDAYARAJ A A, KUPPUSAMI P, THIRUMURUGESAN R, et al. Influence of nitrogen flow rate on growth of TiAlN films prepared by DC magnetron sputtering[J]. Surface engineering, 2007, 23(1):7-11.
[11] 董中林, 于振華, 施毅, 等. 脈沖偏壓對磁過濾陰極電弧離子鍍ta-C薄膜性能的影響[J]. 真空科學與技術學報, 2017, 37(1):78-82. DONG Zhonglin, YU Zhenhua, SHI Yi, et al. Influence of pulse bias on properties of tetrahedral amorphous carbon coatings grown by magnetic-filtered cathodic arc ion plating[J]. Chinese journal of vacuum science and technology, 2017, 37(1):78-82.
[12] 王萌萌, 黃美東, 潘玉鵬, 等. 脈沖偏壓對多弧離子鍍TiAlN薄膜的成分和結構的影響研究[J]. 真空, 2015, 52(1):34-38. WANG Mengmeng, HUANG Meidong, PAN Yupeng, et al. Effects of pulsed bias on composition and structure of TiAlN films by arc ion plating[J]. Vacuum, 2015, 52(1):34-38.
[13] 魏永強, 張艷霞, 文振華, 等. 脈沖偏壓占空比對TiN/TiAlN多層薄膜微觀結構和硬度的影響[J]. 表面技術, 2014, 43(1):1-6, 39. WEI Yongqiang, ZHANG Yanxia, WEN Zhenhua, et al. Effects of different pulsed bias duty cycle on the microstructure and hardness of TiN/TiAlN multilayer coatings[J]. Surface technology, 2014, 43(1):1-6, 39.
[14] 張權, 鄒長偉, 梁俊才, 等. 電磁場對電弧離子鍍沉積AlTiN涂層的影響[J]. 真空科學與技術學報, 2016, 36(6):666-671. ZHANG Quan, ZOU Changwei, LIANG Juncai, et al. Influence of electromagnetic fieldon properties of arc-ion plated AlTiN coatings[J]. Chinese journal of vacuum science and technology, 2016, 36(6):666-671.
[15] WEI Yongqiang, GONG Chunzhi. Effects of pulsed bias duty ratio on microstructure and mechanical properties of TiN/TiAlN multilayer coatings[J]. Applied surface science, 2011, 257(17):7881-7886.
[16] 黃美東, 孫超, 林國強, 等. 脈沖偏壓電弧離子低溫沉積TiN硬質薄膜的力學性能[J]. 金屬學報, 2003, 39(5):516-520. HUANG Meidong, SUN Chao, LIN Guoqiang, et al. Mechanical property of low temperature deposited TiN film by pulsed biased arc ion plating[J]. Acta metallurgica sinica, 2003, 39(5):516-520.
[17] 陳磊, 裴志亮, 肖金泉, 等. 磁過濾電弧離子鍍制備TiAlN涂層的結構與性能表征[J]. 中國腐蝕與防護學報, 2017, 37(3):241-246. CHEN Lei, PEI Zhiliang, XIAO Jinquan, et al. Characterization of structure and property of TiAlN coatings deposited by filtered arc ion plating[J]. Journal of Chinese society for corrosion and protection, 2017, 37(3):241-246.
[18] BHAGCHANDANI R K, BANGARI R S, MEHRA D, et al. High temperature oxidation behavior of nanostructured AlCrN and TiAlN coated Inconel 718 substrate[J]. International journal of advanced scientific research and technology, 2012, 3(2):205-215.
[19] 梁啟超, 王天國. 多弧離子鍍TiAlN薄膜的制備及其抗氧化性能[J]. 材料保護, 2017, 50(1):1-4. LIANG Qichao, WANG Tianguo. Preparation of TiAlN films by multi-arc ion plating techniques and its oxidation resistance[J]. Materials protection, 2017, 50(1):1-4.

備注/Memo

備注/Memo:
收稿日期:2020-01-30。
基金項目:國家自然科學基金項目(11675047,1187050765);黑龍江省自然科學基金項目(E201458);黑龍江工程學院基本科研業務費(創新團隊類)項目(2020CX06);黑龍江工程學院青年科學基金項目(2018QJ01,2012QJ15).
作者簡介:許建平,男,講師,博士研究生.
通訊作者:許建平,E-mail:clxjp@126.com.
更新日期/Last Update: 2021-04-26
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